Switch, Vacuum/Pressure 51A Single-ended Absolute

The MKS Instruments 51A Single-ended Absolute Vacuum/Pressure Switch offers accurate and reliable protection for vacuum equipment, atmospheric switching, and vacuum/pressure processes. Designed for applications where a DC signal output is not required, these switches provide relay outputs that are readily interfaced with alarms, valve actuators, computers, process controllers, load locks and other protection devices. The switch offers 0.5% of Full Scale set point accuracy, factory set trip point and requires 10-20 VDC or 20-30 VDC input power. For reverse calibration the trip point is given as value below atmosphere. The 51A meets the SEMI S2-93 Guidelines. The product was submitted to an independent safety laboratory for tests in accordance with the S2-93 guidelines.