Varian VIISta Trident
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The Trident platform combines patented dual-magnet ribbon beam architecture with an innovative energy purity module (EPM) to deliver sharp, controlled implant profiles. The EPM also effectively filters particles generated from beam line elements, effectively isolating the wafer from such contamination. The VIISta Trident platform is the only high-current system able to measure and correct for beam angle using a unique, closed-loop control system that delivers highly accurate and repeatable incident angle control for true zero degree and precise high-tilt implants.
The VIISta Trident PTC II configuration enhances the Trident platform with cryogenic implantation capabilities that enable damage engineering and precision materials modification applications. At advanced nodes, dopantactivation and elimination of end-of-range defects become significant challenges that can impede the scaling of high performance chips.